| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a protector which can reduce damage when a support substrate is peeled off from a substrate by irradiating laser light, and to provide a substrate laminate, a laminating device, a peeling device, and a manufacturing method of a substrate. <P>SOLUTION: The protector is provided between a substrate and a support substrate of a substrate laminate where the substrate and the support substrate are laminated with a bonding portion, and prevents laser light irradiated through the support substrate from arriving at the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
