| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection method of a moving device in which abnormality of components can be found at an early stage. <P>SOLUTION: An inspection method has: a step of listing components that affect movement accuracy of a movement target due to the component deterioration out of all components which constitute a moving device that moves the movement target to a target position by coarse movement and fine movement of slow moving speed after the coarse movement (S11); a step of confirming whether or not a stop position after coarse movement indicates a predetermined warning value (S12); a step of associating a target, whose stop position is confirmed to indicate the warning value, to detection of the stop position (S13); a step of detecting the stop position after coarse movement (S2); and a step of, in the case where the detected stop position indicates a warning value for a stop position from which movement to the target position can be performed by fine movement, inspecting component deterioration for a component that is associated with the detection of the stop position out of the components shown in the list (S4). <P>COPYRIGHT: (C)2012,JPO&INPIT |
