发明名称 METHOD FOR MANUFACTURING WIRING, THIN FILM TRANSISTOR, LIGHT EMITTING DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE, AND DROPLET DISCHARGE APPARATUS FOR FORMING THE SAME
摘要 As a semiconductor device, specifically, a pixel portion included in a semiconductor device is made to have higher precision and higher aperture ratio, it is required to form a smaller wiring in width. In the case of forming a wiring by using an ink-jet method, a dot spreads on a wiring formation surface, and it is difficult to narrow width of a wiring. In the present invention, a photocatalytic substance typified by TiO2 is formed on a wiring formation surface, and a wiring is formed by utilizing photocatalytic activity of the photocatalytic substance. According to the present invention, a narrower wiring, that is, a smaller wiring in width than a diameter of a dot formed by an ink-jet method can be formed.
申请公布号 US2012094412(A1) 申请公布日期 2012.04.19
申请号 US201113334757 申请日期 2011.12.22
申请人 NAKAMURA OSAMU;OGINO KLYOFUMI;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 NAKAMURA OSAMU;OGINO KLYOFUMI
分类号 G02F1/1368;H01L33/08;B01J35/02;B05D3/00;B05D5/12;C08J7/18;G21H1/00;H01L21/027;H01L21/28;H01L21/288;H01L21/3205;H01L21/336;H01L21/768;H01L27/32;H01L29/786;H01L51/00;H01L51/56 主分类号 G02F1/1368
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