COMPOSITION FOR FORMING MONOLAYER OR MULTILAYER

摘要

[Problem] To provide a composition for forming a monolayer or a multilayer on a substrate. [Solution] A composition for forming a monolayer or a multilayer, the composition containing an organic solvent and a silane compound represented by formula (1A) or formula (1B). (In the formula: each R1 independently represents a methyl group or an ethyl group; each X independently represents a C1-10 linking group; each Z independently represents a C1-10 alkyl group or an optionally substituted phenyl group; X may contain at least one oxygen atom or sulfur atom in the principal chain thereof; and when Z represents an alkyl group, at least one hydrogen atom in the alkyl group may be substituted by a fluorine atom.)