METHOD FOR FORMATION OF ALUMINUM FILM

摘要

Provided is a method by which a homogeneous and dense aluminum film can be formed on a substrate more simply and more easily in comparison to a conventional method. A method for the formation of an aluminum film, which includes: an application step of applying a material which is for the formation of an aluminum film and which contains a complex composed of both an amine compound and aluminum hydride to the surface of a metal layer to form a coating, said metal layer consisting of at least one metal selected from among copper, cobalt, molybdenum, tungsten, aluminum, nickel and gold; and a curing step of subjecting the coating to heat treatment and/or photo-irradiation to form an aluminum film.