| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an indoor atmospheric pressure control system always holding the indoor atmospheric pressure of a clean room at a set atmospheric pressure. <P>SOLUTION: In the indoor atmospheric pressure control system 10, when no fluctuation cause occurs which fluctuates the indoor atmospheric pressure of clean rooms 11 and 12, proximate controllers 23 and 24 refer to measured atmospheric pressure output from sensors 26 and 27 to finely adjust the damper opening of control dampers 21 and 22, thereby holding the indoor atmospheric pressure of the clean rooms 11 and 12 at set atmospheric pressure. When a fluctuation cause occurs, a remote operation controller 25 outputs operation commands for setting the damper opening of the dampers 21 and 22 to predetermined opening to the controllers 23 and 24, and the controllers 23 and 24 adjust the damper opening of the dampers 21 and 22 to predetermined opening according to the operation commands output from the controller 25. <P>COPYRIGHT: (C)2012,JPO&INPIT |
