A polishing pad includes a polishing layer having a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The solid light-transmitting window has an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension. A top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer.
申请公布号
WO2011129959(A3)
申请公布日期
2012.04.19
申请号
WO2011US29468
申请日期
2011.03.22
申请人
APPLIED MATERIALS, INC.;SWEDEK, BOGUSLAW A.;BENNETT, DOYLE E.;BENVEGNU, DOMINIC J.
发明人
SWEDEK, BOGUSLAW A.;BENNETT, DOYLE E.;BENVEGNU, DOMINIC J.