| 摘要 |
PURPOSE: A substrate support assembly and a substrate processing apparatus including the same are provided to minimize the number of connection parts by forming a connector connected to the lower side of a power source feeder rod into an integrated elastic sheet. CONSTITUTION: Interior materials(120, 130) are included in a setting plate(110). The setting plate is settled on the upper side of a substrate. A substrate support assembly supports the substrate in a processing space of a chamber. A power source feeder rod(140) is perpendicularly combined in the lower surface of the setting plate. A screw groove(144a) or a hole(144b) is formed on a connector contact side(142) of the power source feeder rod. A sub-chamber(400) is included on the lower side of a processing chamber(300). The sub-chamber protects a protection shaft(310) projected to the lower side of the processing chamber.
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