| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor device having stable electrical characteristics by preventing laser beams used for tuning a sensor element from melting a stress relaxation layer. <P>SOLUTION: A sensor device 1 comprises: a first electrode 11 provided on an active surface 10a of a silicon substrate 10; an external connection terminal 12 electrically connected to the first electrode; a stress relaxation layer 15 provided between the silicon substrate and the external connection terminal; a connection terminal 13 provided on the active surface of the silicon substrate; and a vibration gyro element 20 having weight parts 26a, 26b, 27a, 27b, 28a, and 28b as mass adjustment parts. The vibration gyro element is held above the silicon substrate by the connection between a connection electrode and the external connection terminal, and includes a melting protection layer 42 formed between the stress relaxation layer and the mass adjustment parts where they overlap each other in plan view. <P>COPYRIGHT: (C)2012,JPO&INPIT |
