发明名称 RESONANT REFLECTION DEVICE, OPTICAL GAS ANALYSIS DEVICE AND IMAGE SCANNER USING THE SAME, AND CONTROL METHOD FOR RESONANT REFLECTION DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a resonant reflection device which makes a movable part stably vibrate, an optical gas analysis device and image scanner using the same, and a control method for the resonant reflection device. <P>SOLUTION: The resonant reflection device comprises: reflection means having a fixed section, a torsion bar whose one end is connected to the fixed section, and a movable section which is connected to the other end of the torsion bar, is a plate member that rotates with respect to the fixed section with a connection section with the torsion bar as a rotation axis, and reflects light by at least one surface, and a driving section that rotates the movable section by being supplied with an AC current; temperature detection means for contactlessly detecting a temperature of the movable section of the reflection means; and control means that adjusts the magnitude of a bias current to be added to the AC current to be supplied to the driving section based on the temperature of the movable section detected by the temperature detection means. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012078515(A) 申请公布日期 2012.04.19
申请号 JP20100222831 申请日期 2010.09.30
申请人 MITSUBISHI HEAVY IND LTD 发明人 ASAUMI SHINICHIRO;MUTA KENJI;DANNO MINORU;TAKITA ATSUSHI
分类号 G02B26/10;B81B3/00;G01N21/27 主分类号 G02B26/10
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