| 摘要 |
<P>PROBLEM TO BE SOLVED: To especially provide a thin physical quantity sensor capable of spreading a detection range in the height direction (Z axis direction) to further obtain stable sensor sensitivity. <P>SOLUTION: A physical quantity sensor has: an anchor part which is fixed to be supported; a movable part 2 which is displaced in the height direction; support parts 3, 4 rotatably connected via a connection part to be elastically deformed; and a detection part 36 for detecting displacement of the movable part 2. The support parts are provided with leg parts 3b, 4b which are displaced in the opposite direction to the displacement direction of the movable part 2 when the movable part 2 is displaced in the height direction. The leg parts 3b, 4b are formed to be elastically displaced so that the leg parts 3b, 4b bend from a state of contacting the surface 30a of a facing part 30 which the legs 3b, 4b face in the height direction and the movable part 2 is displaced in the direction further being separated from the surface of the facing part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
