| 发明名称 |
POLISHING PAD WITH MULTI-MODAL DISTRIBUTION OF PORE DIAMETERS |
| 摘要 |
Polishing pads with multi-modal distributions of pore diameters are described. Methods of fabricating polishing pads with multi-modal distributions of pore diameters are also described.
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| 申请公布号 |
US2012094586(A1) |
申请公布日期 |
2012.04.19 |
| 申请号 |
US20100979123 |
申请日期 |
2010.12.27 |
| 申请人 |
HUANG PING;SCOTT DIANE;LACASSE JAMES P.;ALLISON WILLIAM C. |
发明人 |
HUANG PING;SCOTT DIANE;LACASSE JAMES P.;ALLISON WILLIAM C. |
| 分类号 |
B24B37/04;B29C44/04 |
主分类号 |
B24B37/04 |
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