DESIGN AND CONTROL OF MULTI-TEMPERATURE MICRO-OVEN FOR MEMS DEVICES

摘要

Device for generation of an output signal having a desired frequency, the device comprising: a micro-oven containing a MEMS oscillator, a temperature control system for maintaining the MEMS oscillator at a desired operation temperature in response to a temperature setting signal, a control unit for generating the temperature setting signal. The control unit is provided for selecting the operation temperature for the MEMS oscillator from a plurality of pre-characterised temperatures based on a received parameter set.