发明名称 |
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) STRUCTURE |
摘要 |
A MEMS structure includes a substrate, a structural dielectric layer, and a diaphragm. A structural dielectric layer is disposed over the substrate. The diaphragm is held by the structural dielectric layer at a peripheral end. The diaphragm includes multiple trench/ridge rings at a peripheral region surrounding a central region of the diaphragm. A corrugated structure is located at the central region of the diaphragm, surrounded by the trench/indent rings. |
申请公布号 |
US2012090398(A1) |
申请公布日期 |
2012.04.19 |
申请号 |
US20100904169 |
申请日期 |
2010.10.14 |
申请人 |
SOLID STATE SYSTEM CO., LTD. |
发明人 |
LEE CHIEN-HSING;HSIEH TSUNG-MIN;TSAO LI-CHI;LIOU JHYY-CHENG |
分类号 |
G01L7/08 |
主分类号 |
G01L7/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|