发明名称 |
Using Vacuum Ultra-Violet (VUV) Data in Radio Frequency (RF) Sources |
摘要 |
The invention provide apparatus and methods for creating gate structures on a substrate in real-time using Vacuum Ultra-Violet (VUV) data and Electron Energy Distribution Function (EEDƒ) data and associated (VUV/EEDƒ)-related procedures in (VUV/EEDƒ) etch systems. The (VUV/EEDƒ)-related procedures can include multi-layer-multi-step processing sequences and (VUV/EEDƒ)-related models that can include Multi-Input/Multi-Output (MIMO) models. |
申请公布号 |
US2012091097(A1) |
申请公布日期 |
2012.04.19 |
申请号 |
US201113275929 |
申请日期 |
2011.10.18 |
申请人 |
CHEN LEE;ZHAO JIANPING;TOKYO ELECTRON LIMITED |
发明人 |
CHEN LEE;ZHAO JIANPING |
分类号 |
C23F1/00;C23F1/08 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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