WORKPIECE POSITIONING METHOD AND APPARATUS

摘要

A method of relatively positioning a workpiece and a reference axis comprising effecting relative displacements of the workpiece and the reference axis along orthogonal axes so that an intersection of the reference axis with the workpiece is moved at substantially constant speed along a curvilinear path. The method is particularly applicable to SEE sensitivity mapping of a microchip memory using a pulsed laser, relative to the axis of which the chip is moved in a spiral path.