A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
申请公布号
WO2012027357(A3)
申请公布日期
2012.04.19
申请号
WO2011US48792
申请日期
2011.08.23
申请人
WAYNE STATE UNIVERSITY;WINTER, CHARLES, H.;KNISLEY, THOMAS, J.
