发明名称 RESIN SEALING DEVICE AND RESIN SEALING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a resin sealing method capable of preventing a substrate from being damaged when a molding obtained by resin sealing a semiconductor element mounted on the substrate is released from a mold. <P>SOLUTION: The resin sealing device comprises an upper mold set equipped with a holding mechanism capable of holding a substrate 1 on the lower surface, and a lower mold set mounting a cavity block 63 having a cavity on the upper surface and capable of reciprocating between a molding position and a standby position along a base plate via a horizontal movement mechanism. Frame guides 65 are arranged on at least two sides of the outer periphery of the cavity block 63, and the mold is released by pushing up the outer peripheral edge of the substrate 1 by means of the frame guides 65. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012079937(A) 申请公布日期 2012.04.19
申请号 JP20100224093 申请日期 2010.10.01
申请人 DAIICHI SEIKO CO LTD 发明人 TANAKA YUICHI;RIKIMARU MAKOTO
分类号 H01L21/56 主分类号 H01L21/56
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