| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a susceptor in which a thermocouple does not compress the space around the susceptor, and overpressure is not applied to the thermocouple. <P>SOLUTION: A thermocouple 50 is buried in a disc-like ceramic plate 20. The thermocouple 50 comprises a first and second strands 51, 52 having material compositions different from each other, a temperature measuring part 50a where the tips of the first and second strands 51, 52 are bonded, and horizontal and vertical protective tubes 53, 54 composed of high purity alumina or Mo and covering the first and second strands 51, 52. The ceramic plate 20 is produced by bonding a pair of ceramic discs 22, 24, and the thermocouple 50 is placed in a horizontal groove 24a formed in the lower ceramic disc 24. <P>COPYRIGHT: (C)2012,JPO&INPIT |
