| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a detector, particularly a stacked type detector, that is required to have a smaller pixel pitch and more pixels, and that can achieve low noise with further reduced signal line capacitance, and high driving speed with a further reduced time constant of drive lines. <P>SOLUTION: A detector includes: a plurality of pixels 102 arranged in rows and columns, each of which includes a conversion element 104 for converting radiation or light into electric charge and a switching element 105; a drive line 107 connected to a plurality of switching elements 105 in the rows; and a signal line 108 connected to a plurality of switching elements 105 in the columns, with the conversion element 104 placed above the switching element 105. The signal line 108 comprises a conductive layer 202 that is buried and formed in an insulation member in a layer below the top surface of a main electrode of the switching element 105. This switching element 105 is placed below the top surface of the drive line 107 that is placed below the conversion element 104. <P>COPYRIGHT: (C)2012,JPO&INPIT |
