| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrode pair array plate which is advantageous in the number of electrode pairs used to deflect a charged-particle beam, fast response of deflection, and the ease of manufacture. <P>SOLUTION: An electrode pair array plate (123) containing a plurality of electrode pairs (303) respectively used to deflect a plurality of charged-particle beams includes laminates (300a, 300b) containing plural wiring layers and a plurality of open holes (302) formed in the laminate, through which the plurality of charged-particle beams respectively pass. The laminates include a plurality of electrode pairs which are formed in the plurality of open holes, one pair in each hole, and the plurality of electrode pairs include an array of electrode pairs in each of a plurality of different layers of the laminate, the arrays in plural layers being connected respectively to a part out of the plural wiring layers differing from each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
