| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently remove dirt attached to a substrate placing surface. <P>SOLUTION: A cover for cleaning 100 is placed opposite to a part of the substrate placing surface (the upper surface of a substrate holder 50). Compressed gas is jetted between the lower surface of the cover for cleaning 100 and the substrate placing surface (between the opposed surfaces) from the cover for cleaning 100 and the substrate holder 50 to agitate gas hard between the opposed surfaces, and the gas is aspirated from between the opposed surfaces by the substrate holder 50. Dirt D on the substrate placing surface which is attached to an area opposed to the lower surface of the cover for cleaning 100 is therefore mixed into the gas agitated between the opposed surfaces and removed by being aspirated with the gas. <P>COPYRIGHT: (C)2012,JPO&INPIT |
