| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an IC handler capable of pressing an IC device by selectively switching between a high pressure and a low pressure by the same apparatus in inspection of an IC device, and an IC inspection apparatus. <P>SOLUTION: The IC handler which sucks an IC device by sucking means and conveys it to an inspection stage includes: a motor; lifting means for lifting and lowering the sucking means for the inspection stage according to rotation of the motor; pressurization means provided between the sucking means and the lifting means for pressing the IC device sucked by the sucking means onto the inspection stage; and pressure adjustment means for changing a pressure of the press of the pressurization means by selectively changing multiple pressure modes including a low pressure mode and a high pressure mode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
