| 摘要 |
An apparatus and a method of manufacturing an e-fuse includes a substrate, a patterned gate insulator on the substrate, and a patterned gate conductor on the patterned gate insulator. The patterned gate conductor has sidewalls and a top. A silicide contacts the sidewalls of the patterned gate conductor, the top of the patterned gate conductor, and a region of the substrate adjacent the patterned gate insulator and the patterned gate conductor. |
