发明名称 |
ANTENNA UNIT FOR GENERATING PLASMA AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME |
摘要 |
An antenna unit for generating a plasma includes: a first antenna including a first incoming portion and a plurality of first sub-antennas divided from the first incoming portion; and a second antenna including a second incoming portion and a plurality of second sub-antennas divided from the second incoming portion, the first and second incoming portions constituting a coaxial line. |
申请公布号 |
US2012090785(A1) |
申请公布日期 |
2012.04.19 |
申请号 |
US201113272235 |
申请日期 |
2011.10.13 |
申请人 |
JANG YONG-JUN;JUSUNG ENGINEERING CO., LTD |
发明人 |
JANG YONG-JUN |
分类号 |
H01L21/3065;C23C16/505;H01J37/32 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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