发明名称 |
METROLOGY PROBE AND METHOD OF CONFIGURING A METROLOGY PROBE |
摘要 |
A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low-pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input. |
申请公布号 |
KR20120037395(A) |
申请公布日期 |
2012.04.19 |
申请号 |
KR20117029876 |
申请日期 |
2010.05.28 |
申请人 |
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK |
发明人 |
CHOPRA HARSH DEEP;ARMSTRONG JASON N.;HUA ZONGLU |
分类号 |
G01Q70/08;B82B1/00;G01N27/04;G01Q60/38 |
主分类号 |
G01Q70/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|