| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sputtering device capable of efficiently manufacturing a heat-resistant resin film with metal base layers on both surfaces thereof excelling in flatness and productivity. <P>SOLUTION: While a heat-resistant resin film 112 wound off from a winding-off roll 111 is folded back by drive rolls 118, 119, 120, 121, 122, 123, film deposition progresses at the same time on a first film deposition surface and a second film deposition surface of the heat-resistant resin film 112 by at least four units of facing sputtering units 129, 130, 131, 132 having openings in the direction of the heat-resistant resin film 112 and each including two openings. One sides of the facing sputtering units 129, 132 at both ends are formed by single-sided film deposition. <P>COPYRIGHT: (C)2012,JPO&INPIT |
