| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a TFT array inspection device which detects defects of a gate drive circuit on a substrate having two gate drive circuits in a TFT array region, even in the case that one of the gate drive circuits has the defects. <P>SOLUTION: A TFT array inspection device comprises a gate drive circuit driver part which supplies driving signals to gate drive circuits arranged on a substrate as an inspection object and a detecting part which scans a TFT array region arranged on the substrate as the inspection object and detects the drive states of the gate drive circuits and the TFT array region based on a scanning image of the TFT array region obtained from the scan. The gate drive circuit driver part supplies driving signals to two gate drive circuits, respectively, so as to individually drive the TFT array region. The detecting part obtains two scanning images when each of the gate drive circuits are driven, detects non-driven parts on each of the scanning images, and detects the non-driven states of the TFT array region and the gate drive circuits based on the emerging state of the non-driven part detected on the each of the scanning images. <P>COPYRIGHT: (C)2012,JPO&INPIT |
