| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high quality transfer carrier where dust or grinding agent (oil) does not remain on a substrate when a hole or a recess is formed therein, and coating liquid does not adhere to the inside of the hole or recess, and to provide a method of manufacturing a transfer carrier efficiently. <P>SOLUTION: The manufacturing method of a transfer carrier comprises: a hole or recess formation step of forming a hole or a recess at least in a part of a substrate; a coating film formation step of forming a coating film by screen printing a coating liquid containing polydimethylsiloxane composition, which contains at least polydimethylsiloxane, after coating the hole or recess with a mask provided on a screen plate; and a calcination step of calcining the coating. <P>COPYRIGHT: (C)2012,JPO&INPIT |
