| 摘要 |
Provided is a humidity sensor having a heater and a readout circuit element therein, wherein a humidity sensing unit is provided on an upper surface of a ceramic substrate having a structure in which a plurality of ceramic layers are laminated. The heater is disposed between the ceramic layers under the humidity sensing unit to maintain the humidity sensing unit at room temperature, and the readout circuit element is disposed within a cavity which is formed in a lower portion of the ceramic substrate. Therefore, it is possible to improve the efficiency of heat transfer to the humidity sensing unit, and to reduce the size of the humidity sensor. |
