发明名称 SILICON SUBSTRATE OPTIMIZATION FOR MICROARRAY TECHNOLOGY
摘要 A micro device includes a substrate and a structure configured to bind to an object or a material, or not to bind to an object or material. The structure has a roughness based on a roughness of the object or material. For example, a microarray includes a substrate and a well positioned in the substrate and configured to bind to a type of bead. The well has a roughness based on a roughness of the type of bead to which the well is configured to bind. The roughness of the well is controlled by controlling a position and number of striations in the side of the well. In another example, a moveable component of a micro device may have a roughness different from a roughness of an adjacent component, to reduce the likelihood of the moveable component sticking to the adjacent component.
申请公布号 US2012093700(A1) 申请公布日期 2012.04.19
申请号 US201113272063 申请日期 2011.10.12
申请人 PESATURO MASSIMILIANO;POWELL ROBERT J.;STMICROELECTRONICS, INC. 发明人 PESATURO MASSIMILIANO;POWELL ROBERT J.
分类号 G06F19/00;B01J19/00 主分类号 G06F19/00
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