| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light-receiving element, a semiconductor device, and an electronic apparatus that are capable of contributing to stabilization of spectral sensitivity characteristics, in which variation among products is hard to occur, and are capable of easily ensuring characteristics approximate to visibility characteristics, and to provide a method of manufacturing the light-receiving element and the semiconductor device. <P>SOLUTION: A first stacked structure B1 comprises: a first layer 18a composed of a silicon oxide film; a second layer 19a composed of a silicon nitride film; and a third layer 20a composed of a polysilicon film. A second stacked structure B2 comprises: a first layer 18b composed of the silicon oxide film; a second layer 19b composed of the silicon nitride film; and a third layer 21a composed of a polycrystalline silicon-germanium film. A third stacked structure B3 comprises: a first layer 18c composed of the silicon oxide film; the second layer 19b composed of the silicon nitride film; a third layer 20b composed of the polysilicon film; and a fourth layer 21b composed of the polycrystalline silicon-germanium film. <P>COPYRIGHT: (C)2012,JPO&INPIT |
