发明名称 SEMICONDUCTOR WAFER, SEMICONDUCTOR ELEMENT, PHOTO DETECTOR, FLIP-CHIP CONNECTION STRUCTURE, DETECTOR, AND METHOD OF MANUFACTURING SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor element having a bump array which is hard to cause a short circuit between bumps, with no increase in effective area, using a high-density flip-chip junction method. <P>SOLUTION: An expanded square lattice includes a bump 9 and an electrode 11 arrayed in square lattice of side length R, with four square lattices being arranged. The bump is matched with the electrode at a corner. Relating to two sides of first set that face each other in the expanded square lattice, a central bump is deviated from the side by a(>0) in orthogonal direction. Relating to two sides of other second set, the central bump is deviated from the side by b(>0) in orthogonal direction. A bump positioned at the center of the expanded square lattice is deviated by the deviation a synthesized with the deviation b. Here, R, a, and b satisfy ä(a/R)-1}<SP POS="POST">2</SP>+ä(b/R)-1}<SP POS="POST">2</SP>>1....(1). <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012079973(A) 申请公布日期 2012.04.19
申请号 JP20100224969 申请日期 2010.10.04
申请人 SUMITOMO ELECTRIC IND LTD 发明人 MORI DAIKI
分类号 H01L21/60 主分类号 H01L21/60
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