| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of polishing an object to be polished for accurately forming a surface as a concave surface or a convex surface by polishing the surface of the object to be polished, and to provide a polishing pad. <P>SOLUTION: The object 20 to be polished is polished by rotating the polishing pad 10 and the object 20 to be polished, by arranging the object 20 to be polished in a state of straddling a boundary between a first polishing area 11 and a second polishing area 12, on the polishing pad 10. In the polishing pad 10, groove states in the central side and the outside in the radial direction on the surface are different from each other, any one area of the central side and the outside is the first polishing area 11 formed with grooves, and the another area is the second polishing area 12 having a groove state different from that of the first polishing area 11. <P>COPYRIGHT: (C)2012,JPO&INPIT |
