| 摘要 |
<P>PROBLEM TO BE SOLVED: To hold a substrate in a state where an influence of distortion and deflection of a substrate caused by self-weight of the substrate and contact pressure of a terminal is further reduced. <P>SOLUTION: A substrate 15 is supported via movable contact parts 103 contactably provided to the lower part of the substrate. Force supporting the self-weight of the substrate 15 is made equal between the movable contact parts 103 by moving or deforming each movable contact part 103 by common liquid. <P>COPYRIGHT: (C)2012,JPO&INPIT |
