发明名称 STACKED DEVICE AND METHOD FOR STACKING INTEGRATED CIRCUIT DEVICES
摘要 A stacking apparatus that stacks chip assemblies each having a plurality of chips disposed continuously with circuit patterns and electrodes, includes: a plurality of stages each allowed to move arbitrarily, on which the chip assemblies are placed; a storage means for storing an estimated extent of change in a position of an electrode at each chip, expected to occur as heat is applied to the chip assemblies placed on the plurality of stages during a stacking process; and a control means for setting positions of the plurality of stages to be assumed relative to each other during the stacking process based upon the estimated extent of change in the position of the electrode at each chip provided from the storage means and position information indicating positions of individual chips formed at the chip assemblies and controlling at least one of the plurality of stages.
申请公布号 KR101137064(B1) 申请公布日期 2012.04.19
申请号 KR20067013494 申请日期 2005.01.07
申请人 发明人
分类号 H01L25/00;H01L21/00;H01L21/98;H01L23/12;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L25/00
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