| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate with an alignment mark, on which alignment can be performed with high precision when a transparent conductive part is formed in a pattern shape and a pattern-shaped functional layer is laminated so as to correspond to the transparent conductive part. <P>SOLUTION: An alignment mark substrate 10 comprises: a substrate 11; and an alignment mark layer 12 formed on the substrate 11 and having a recessed part 13 for alignment on a surface thereof, the recessed part being formed in a recessed form. In the alignment mark substrate, when a transparent conductive part 21 such as a transparent electrode or a transparent semiconductor is formed on the alignment mark layer 12 and a functional layer 22 is further formed on the transparent conductive part 21, the recessed part 13 for alignment is used as a reference, so that alignment can be performed precisely even if the transparent conductive part 21 is transparent. <P>COPYRIGHT: (C)2012,JPO&INPIT |
