| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic sensor module that has a semiconductor substrate (an element substrate) mounted on a mounting surface in an easy and reliable manner so that a pair of principal surfaces is perpendicular to the mounting surface, and a manufacturing method of the magnetic sensor module. <P>SOLUTION: A magnetic sensor module 10 includes a semiconductor substrate 50 with a magnetic sensing part 54 formed thereon that detects a magnetic field parallel to a pair of principal surfaces 51, 52, and a module substrate 20 having a mounting surface 21 on which the semiconductor substrate 50 is mounted. The semiconductor substrate 50 is arranged on the mounting surface 21 in a state where the pair of the principle surfaces 51, 52 is perpendicular to the mounting surface 21, and both of the pair of the principle surfaces 51, 52 are connected to the mounting surface 21 via a metal bump 60. <P>COPYRIGHT: (C)2012,JPO&INPIT |
