| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition not only having sufficient basic characteristics such as sensitivity and resolution but having sufficient DOF performance. <P>SOLUTION: The radiation-sensitive resin composition contains: (A) a compound having an alicyclic hydrocarbon skeleton having 6 to 25 carbon atoms, the alicyclic hydrocarbon skeleton having two or more carbonyl groups; and (B) a resin which is protected with an acid-dissociable group, is insoluble or hardly soluble with an alkali, and is changed into alkali-soluble when the acid-dissociable group is dissociated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
