| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece holding head for holding a workpiece to be worked while improving throughput and usability. <P>SOLUTION: The workpiece holding head 10 includes a workpiece holding part 11 and an arm attachment part 12. The workpiece holding part 11 has a porous area 111 for sucking the workpiece. The porous area 111 is connected with an internal space 121 through a buffer 112 and a connection port 113. A spherical body 131 and a closure valve 144 are provided in the internal space 121. When sucking the workpiece to be worked, by vacuum-sucking through an opening 134, the spherical body 131 comes off from a sealing member 153 to depressurize the internal space of the workpiece holding head 10. When the vacuum-suction stops, the spherical body 131 comes into tight contact with the sealing member 153 to keep the depressurized state. To remove the workpiece, the closure valve 144 is opened to introduce the atmospheric pressure into the internal space. <P>COPYRIGHT: (C)2012,JPO&INPIT |
