| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection method for a foreign matter in a solution capable of quickly and accurately discriminating air bubbles and a foreign matter included in the solution. <P>SOLUTION: A foreign matter detection method for detecting a foreign matter in a solution by imaging the foreign matter in the solution by an imaging means includes (a) a first arithmetic operation means for comparing an image acquired by the imaging means with a preset first threshold to extract bright part data and dark part data, (b) a second arithmetic operation means for generating a convex hull pattern of the dark part data extracted by the first arithmetic operation means to extract it, and (c) a third arithmetic means for calculating the ratio between the area of the dark part data extracted by the first arithmetic operation means and the area of the convex hull pattern of the dark part data extracted by the second arithmetic operation means, comparing it with a preset second threshold and discriminating air bubbles and a foreign matter. <P>COPYRIGHT: (C)2012,JPO&INPIT |
