BARRIER FILM, AND ORGANIC ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a uniform film capable of achieving both of barrier performance and bending resistance so as to be applied to an element or the like requiring barrier property such as a substrate for an organic electronic device.

SOLUTION: A barrier film has at least one layer of organic layer on a resin substrate, wherein a first SiOx(x>2) layer having a thickness of 5 to 150 nm on the organic layer and at least two layers of inorganic layers which contain silicon atoms and oxygen atoms are formed on the SiOx(x>2) layer.

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