发明名称 APPARATUS AND METHOD FOR PRINTING PROCESS SIMULATION
摘要 The present invention relates to an apparatus and a method for printing process simulation, and more particularly, to an apparatus and a method for printing process simulation which automatically investigate the adhesion characteristics among materials for a printing process and effects of process conditions on the adhesion characteristics. According to the present invention, adhesion characteristics among a stamp, ink, a base material and a substrate can be automatically calculated using a load sensor or the like.
申请公布号 WO2011155808(A3) 申请公布日期 2012.04.19
申请号 WO2011KR04315 申请日期 2011.06.13
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS;KIM, KWANG-SEOP;KIM, JAE-HYUN;JANG, BONG KYUN;LEE, HAK-JOO 发明人 KIM, KWANG-SEOP;KIM, JAE-HYUN;JANG, BONG KYUN;LEE, HAK-JOO
分类号 H01L21/027 主分类号 H01L21/027
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