发明名称 |
Stacked Coplanar Waveguides Having Signal and Ground Lines Extending Through Plural Layers |
摘要 |
An integrated circuit structure includes a semiconductor substrate; an interconnect structure over the semiconductor substrate; a first dielectric layer over the semiconductor substrate and in the interconnect structure; a second dielectric layer in the interconnect structure and over the first dielectric layer; and a wave-guide. The wave-guide includes a first portion in the first dielectric layer and a second portion in the second dielectric layer. The first portion adjoins the second portion. |
申请公布号 |
US2012094480(A1) |
申请公布日期 |
2012.04.19 |
申请号 |
US201113273815 |
申请日期 |
2011.10.14 |
申请人 |
CHO HSIU-YING;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHO HSIU-YING |
分类号 |
H01L21/768 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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