RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition suppressing generation of particles in a liquid of the composition even when stored for a long period of time, and having excellent storage stability as showing little change with time in characteristics such as superior sensitivity to radiation and a high receding contact angle during exposure.

SOLUTION: The radiation-sensitive resin composition contains: a fluorine-containing polymer (A) including a structural unit (f1) having a base-dissociable group; a compound (C) that generates an acid by irradiation with radiation; and a salt (D) that generates a compound having a specified pKa by irradiation with radiation.

COPYRIGHT: (C)2012,JPO&INPIT