Method for forming Cu-thin film,申请号EP19990115693-传众专利搜索

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发明名称	Method for forming Cu-thin film
摘要
申请公布号	EP0980094(B1)	申请公布日期	2012.04.18
申请号	EP19990115693	申请日期	1999.08.09
申请人	ULVAC, INC.	发明人	ODA, MASAAKI;IMAZEKI, NOBUYA;YAMAKAWA, HIIROYUKI;MURAKAMI, HIROHIKO
分类号	H01L21/768;H01L21/288	主分类号	H01L21/768
代理机构		代理人
主权项
地址

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