发明名称 METHOD AND SYSTEM FOR SUPPLYING HIGH PURITY FLUID
摘要 A fluid purifying apparatus that includes a manifold that includes a first branch and a second branch, a first check valve coupled to the first branch of the manifold, and a purifier unit that includes a first end and a second end, wherein the first end is coupled to the second branch of the manifold. Also, a fluid purifying apparatus that includes a vessel that includes a first interior compartment for containing a purifier material and a second interior compartment for containment of a fluid containing impurities, wherein the first interior compartment is separated from the second interior compartment by a fluid permeable support, and a rupturable seal.
申请公布号 KR101136638(B1) 申请公布日期 2012.04.18
申请号 KR20117004741 申请日期 2003.12.22
申请人 发明人
分类号 B01D53/04;B01D53/02;B01J4/04;C23C16/44;F17C5/00;F17C6/00;F17C7/00;F17C9/00;F17C13/02 主分类号 B01D53/04
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