Apparatus and method for atomic layer deposition on a surface,申请号EP20100187466-传众专利搜索

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发明名称	Apparatus and method for atomic layer deposition on a surface
摘要
申请公布号	EP2441860(A1)	申请公布日期	2012.04.18
申请号	EP20100187466	申请日期	2010.10.13
申请人	NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO	发明人	KNAAPEN, RAYMOND JACOBUS WILHELMUS;POODT, PAULUS WILLIBRORDUS GEORGE;SMELTINK, JEROEN ANTHONIUS;OLIESLAGERS, RUUD;GALAKTIONOV, OLEKSIY SERGIYOVICH
分类号	C23C16/46;C23C16/455	主分类号	C23C16/46
代理机构		代理人
主权项
地址

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