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发明名称
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (cMUT) AND ITS PRODUCTION METHOD
摘要
申请公布号
EP1781067(A4)
申请公布日期
2012.04.18
申请号
EP20050766367
申请日期
2005.07.15
申请人
OLYMPUS CORPORATION
发明人
ADACHI, HIDEO;WAKABAYASHI, KATSUHIRO;YASUNAGA, SHINJI;NEMOTO, KIYOSHI;MURAKAMI, MIYUKI
分类号
H04R19/00;H04R19/01;H04R31/00
主分类号
H04R19/00
代理机构
代理人
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