发明名称 |
PIEZOELECTRIC RESONATOR WITH TWO PIEZOELECTRIC LAYERS |
摘要 |
<p>A piezoelectric resonator device includes: a top electrode layer with a patterned structure, a top piezoelectric layer adjacent to the top layer, a middle metal layer adjacent to the top piezoelectric layer opposite the top layer, a bottom piezoelectric layer adjacent to the middle layer opposite the top piezoelectric layer, and a bottom electrode layer with a patterned structure and adjacent to the bottom piezoelectric layer opposite the middle layer. The top layer includes a first plurality of electrodes inter-digitated with a second plurality of electrodes. A first one of the electrodes in the top layer and a first one of the electrodes in the bottom layer are coupled to a first contact, and a second one of the electrodes in the top layer and a second one of the electrodes in the bottom layer are coupled to a second contact.</p> |
申请公布号 |
EP2441171(A1) |
申请公布日期 |
2012.04.18 |
申请号 |
EP20100724667 |
申请日期 |
2010.06.10 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
BLACK, JUSTIN, P.;STEPHANOU, PHILIP, J. |
分类号 |
H03H9/60;H03H9/58 |
主分类号 |
H03H9/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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